漏率:10-10mbar.l/s
材質(zhì):不銹鋼、鋁合金
密封方式:金屬密封
控制方式:手動(dòng)、氣動(dòng)、電磁驅(qū)動(dòng)
法蘭接口:CF-R、ISO-K、ISO-KF
角閥或直通閥 帶波紋管進(jìn)給裝置
注意事項(xiàng)
拆裝閥門一定要用恰當(dāng)?shù)墓ぞ撸〞r(shí)做好閥門保養(yǎng),
規(guī)范的操作和使用有利于延長(zhǎng)閥門壽命,保持良好性能。
263 - HV angle valve DN100 - 160High vacuum angle
valve with bellows feedthrough and large conductance.
![](https://img80.ppzhan.com/5eceadd4559dcfd2dbc25f0db39dbb82c12c1f56ec41261d92e6442da9b0c7fa9fd3a6560962c802.png)
264 - HV angle valve (DN10 - 250)High vacuum angle
valves with bellows feedthrough. Modular design
.![](https://img80.ppzhan.com/5eceadd4559dcfd2dbc25f0db39dbb82c12c1f56ec41261d8584e0b93ba7244943881bd997f18c91.jpg)
284 - UHV angle valve (DN16, DN40, DN63)UHV angle
valves. Extremely low outgassing rate.
615 - Butterfly with sealing functionDownstream pressure
control and isolation valve Compact design Fast operation
High-performance, integrated controller Low minimum con
trollable conductance
![](https://img80.ppzhan.com/5eceadd4559dcfd2dbc25f0db39dbb82c12c1f56ec41261dedf478bd491831a2913e3f61e4f1e4c8.jpg)
641 - PM-4 / PM-5 Pressure controller for Series 64Pressure
controller for Series 64.0 valves (with stepper motor) and Series 64.2
![](https://img80.ppzhan.com/5eceadd4559dcfd2dbc25f0db39dbb82c12c1f56ec41261dcdd87b71cf67ce55b0881c6d9e2c0fce.png)
642 - Control gate valveControl gate valves with stepper motor
for controlling and isolation. A valve in combination with an adaptive
pressure controller PM4/5 is a pressure control system.
650 - Pendulum valve control systemPressure control and isolation
valves with pendulum plate for downstream applications. Compact design.
Fast, virtually particle-free and shock-free operation. Powerful integrated controller.